スウェーデン・マルメで開催される 15^th International Conference on Nitride Semiconductors（ICNS-15）で小林准教授が口頭発表をします。

[GR-Fri-2] Sputter Epitaxy of ScAlN Films on MOCVD-Grown GaN HEMT Structures
Atsushi Kobayashi, Tomoya Okuda, Shunsuke Ota, Takahiko Kawahara, Kozo Makiyama, Ken Nakata, Kouei Kubota, Yusuke Wakamoto, Takuya Maeda

[PC-Tue-B9] X-ray Spectroscopic Characterization of Surface Oxidation of ScAlN Thin Films Grown by Sputtering on GaN
Hikaru Sasaki, Akihira Munakata, Masaki Kobayashi, Ryota Yamamoto, Sawaki Sato, Atsushi Kobayashi, Takuya Maeda

[ED-Thu-A3] Enhancement of 2DEG Density by Sputtering Regrowth of ScAlN on AlGaN/AlN/GaN Heterostructure
Kouei Kubota, Yusuke Wakamoto, Takahiko Kawahara, Shigeki Yoshida, Kozo Makiyama, Ken Nakata, Atsushi Kobayashi, Takuya Maeda