研究業績
論文
2025
Sputter epitaxy of ScAlN films on GaN high electron mobility transistor structures
Applied Physics Letters 126, 052105 (2025).
DOI: 10.1063/5.0228924
Sputter Epitaxy of Transition Metal Nitrides: Advances in Superconductors, Semiconductors, and Ferroelectrics
Physica Status Solidi A 2400896 (2025).
DOI: 10.1002/pssa.202400896
2024
Structural characterization of epitaxial ScAlN films grown on GaN by low-temperature sputtering
Applied Physics Express 17, 011002 (2024).
DOI: 10.35848/1882-0786/ad120b
Structural and optical properties of epitaxial ScxAl1−xN coherently grown on GaN bulk substrates by sputtering method
Applied Physics Letters 125, 022103 (2024).
DOI: 10.1063/5.0213662
Hole Conduction Mechanism in In–Mg-Codoped GaN Prepared via Pulsed Sputtering Deposition
Physica Status Solidi A 221, 2300806 (2024).
DOI: 10.1002/pssa.202300806
Temperature‐Dependent Characteristics of AlN/Al0.5Ga0.5N High Electron Mobility Transistors with Highly Degenerate n‐Type GaN Regrown Ohmic Contacts
Physica Status Solidi A 2300848 (2024).
DOI: 10.1002/pssa.202300848
2023
Epitaxial Junction of Inversion Symmetry Breaking AlN and Centrosymmetric NbN: A Polarity Control of Wide-Bandgap AlN
ACS Applied Electronic Materials 5, 240 (2023).
DOI: 10.1021/acsaelm.2c01288
Electrical properties of N-polar Si-doped GaN prepared by pulsed sputtering
Applied Physics Express 16, 011002 (2023).
DOI: 10.35848/1882-0786/acb2b1
Positive impurity size effect in degenerate Sn-doped GaN prepared by pulsed sputtering
Applied Physics Letters 122, 082102 (2023).
DOI: 10.1063/5.0118126
Preparation of degenerate n-type AlxGa1−xN (0 < x ≤ 0.81) with record low resistivity by pulsed sputtering deposition
Applied Physics Letters 122, 232102 (2023).
DOI: 10.1063/5.0144418
2022
Crystal-Phase Controlled Epitaxial Growth of NbNx Superconductors on Wide-Bandgap AlN Semiconductors
Advanced Materials Interfaces 9, 2201244 (2022).
DOI: 10.1002/admi.202201244
AlN/Al0.5Ga0.5N HEMTs with heavily Si-doped degenerate GaN contacts prepared via pulsed sputtering
Applied Physics Express 15, 031002 (2022).
DOI: 10.35848/1882-0786/ac4fcf
Schottky barrier height engineering in vertical p-type GaN Schottky barrier diodes for high-temperature operation up to 800 K
Applied Physics Letters 121, 232103 (2022).
DOI: 10.1063/5.0123299
Reduction of Twin Boundary in NbN Films Grown on Annealed AlN
Crystal Growth & Design 22, 1720 (2022).
DOI: 10.1021/acs.cgd.1c01287
2021
Pulsed sputtering growth of heavily Si-doped GaN (20-21) for tunneling junction contacts on semipolar InGaN (20-21) LEDs
Applied Physics Express 14, 051011 (2021).
DOI: 10.35848/1882-0786/abf669
Vertical p-type GaN Schottky barrier diodes with nearly ideal thermionic emission characteristics
Applied Physics Letters 118, 022102 (2021).
DOI: 10.1063/5.0036093
Heavily Si-doped pulsed sputtering deposited GaN for tunneling junction contacts in UV-A light emitting diodes
Applied Physics Letters 118, 072101 (2021).
DOI: 10.1063/5.0040500
Ultrathin rock-salt type NbN films grown on atomically flat AlN/sapphire substrates
Journal of Crystal Growth 572, 126269 (2021).
DOI: 10.1016/j.jcrysgro.2021.126269
High Electron Mobility AlN on Sapphire (0001) with a Low Dislocation Density Prepared via Sputtering and High-Temperature Annealing
Physics Status Solidi A 218, 2100074 (2021).
DOI: 10.1002/pssa.202100074
2020
Growth of InN ultrathin films on AlN for the application to field-effect transistors
AIP Advances 10, 125221 (2020).
DOI: 10.1063/5.0035203
Coherent epitaxial growth of superconducting NbN ultrathin films on AlN by sputtering
Applied Physics Express 13, 061006 (2020).
DOI: 10.35848/1882-0786/ab916e
Combined infrared reflectance and Raman spectroscopy analysis of Si-doping limit of GaN
Applied Physics Letters 117, 192103 (2020).
DOI: 10.1063/5.0023112
Autonomous growth of NbN nanostructures on atomically flat AlN surfaces
Applied Physics Letters 117, 231601 (2020).
DOI: 10.1063/5.0031604
2019
Characteristics of unintentionally doped and lightly Si-doped GaN prepared via pulsed sputtering
AIP Advances 9, 075123 (2019).
DOI: 10.1063/1.5103185
Wide range doping controllability of p-type GaN films prepared via pulsed sputtering
Applied Physics Letters 114, 032102 (2019).
DOI: 10.1063/1.5079673
Improving the electron mobility of polycrystalline InN grown on glass substrates using AlN crystalline orientation layers
Journal of Applied Physics 126, 075701 (2019).
DOI: 10.1063/1.5117307
Operations of hydrogenated diamond metal-oxide-semiconductor field-effect transistors after annealing at 500 °C
Journal of Physics D: Applied Physics 52, 315104 (2019).
DOI: 10.1088/1361-6463/ab1e31
Optical characteristics of highly conductive n-type GaN prepared by pulsed sputtering deposition
Scientific Reports 9, 20242 (2019).
DOI: 10.1038/s41598-019-56306-0
AlN/InAlN thin-film transistors fabricated on glass substrates at room temperature
Scientific Reports 9, 6254 (2019).
DOI: 10.1038/s41598-019-42822-6
2018
Growth of Si-doped AlN on sapphire (0001) via pulsed sputtering
APL Materials 6, 111103 (2018).
DOI: 10.1063/1.5051555
Epitaxial Growth of Thick Polar and Semipolar InN Films on Yttria-Stabilized Zirconia Using Pulsed Sputtering Deposition
Physica Status Solidi B 255, 1700320 (2018).
DOI: 10.1002/PSSB.201700320
2017
Electron transport properties of degenerate n-type GaN prepared by pulsed sputtering
APL Materials 5, 126102 (2017).
DOI: 10.1063/1.5008913
Highly conductive Ge-doped GaN epitaxial layers prepared by pulsed sputtering
Applied Physics Express 10, 101002 (2017).
DOI: 10.7567/APEX.10.101002
Electrical properties of Si-doped GaN prepared using pulsed sputtering
Applied Physics Letters 110, 042103 (2017).
DOI: 10.1063/1.4975056
Characterization of GaN films grown on hafnium foils by pulsed sputtering deposition
Physica Status Solidi A 214, 1700244 (2017).
DOI: 10.1002/pssa.201700244
Epitaxial growth of semipolar InAlN films on yttria-stabilized zirconia
Physica Status Solidi B 254, 1700211 (2017).
DOI: 10.1002/PSSB.201700211
Pulsed sputtering epitaxial growth of m-plane InGaN lattice-matched to ZnO
Scientific Reports 7, 12820 (2017).
DOI: 10.1038/S41598-017-12518-W
Fabrication of full-color GaN-based light-emitting diodes on nearly lattice-matched flexible metal foils
Scientific Reports 7, 2112 (2017).
DOI: 10.1038/s41598-017-02431-7
2016
Epitaxial growth of GaN films on nearly lattice-matched hafnium substrates using a low-temperature growth technique
APL Materials 4, 076104 (2016).
DOI: 10.1063/1.4959119
High hole mobility p-type GaN with low residual hydrogen concentration prepared by pulsed sputtering
APL Materials 4, 086103 (2016).
DOI: 10.1063/1.4960485
InN thin-film transistors fabricated on polymer sheets using pulsed sputtering deposition at room temperature
Applied Physics Letters 109, 032106 (2016).
DOI: 10.1063/1.4959777
High-current-density indium nitride ultrathin-film transistors on glass substrates
Applied Physics Letters 109, 142104 (2016).
DOI: 10.1063/1.4964422
Epitaxial growth of In-rich InGaN on yttria-stabilized zirconia and its application to metal-insulator-semiconductor field-effect transistors
Journal of Applied Physics 120, 085709 (2016).
DOI: 10.1063/1.4961876
Fabrication of InGaN thin-film transistors using pulsed sputtering deposition
Scientific Reports 6, 29500 (2016).
DOI: 10.1038/srep29500
2015
Investigation of anisotropic wafer bending curvature in a-plane GaN films grown on r-plane sapphire substrates
Journal of Crystal Growth 424, 11 (2015).
DOI: 10.1016/j.jcrysgro.2015.04.041
2014
Structural properties of GaN films grown on multilayer graphene films by pulsed sputtering
Applied Physics Express 7, 085502 (2014).
DOI: 10.7567/APEX.7.085502
AlGaN/GaN heterostructure prepared on a Si (110) substrate via pulsed sputtering
Applied Physics Letters 104, 182111 (2014).
DOI: 10.1063/1.4876449
Solid-phase epitaxy of InOxNy alloys via thermal oxidation of InN films on yttria-stabilized zirconia
Physica Status Solidi RRL 8, 362 (2014).
DOI: 10.1002/pssr.201400007
Field-effect transistors based on cubic indium nitride
Scientific Reports 4, 3951 (2014).
DOI: 10.1038/srep03951
Fabrication of full-color InGaN-based light-emitting diodes on amorphous substrates by pulsed sputtering
Scientific Reports 4, 5325 (2014).
DOI: 10.1038/srep05325
Theoretical study of InN growth on Mn-stabilized zirconia (111) substrates
Thin Solid Films 551, 110 (2014).
DOI: 10.1016/j.tsf.2013.11.100
2013
Theoretical Investigation of the Polarity Determination for c-Plane InN Grown on Yttria-Stabilized Zirconia (111) Substrates with Yttrium Surface Segregation
Applied Physics Express 6, 021002 (2013).
DOI: 10.7567/APEX.6.021002
Structural Properties of m-Plane InAlN Films Grown on ZnO Substrates with Room-Temperature GaN Buffer Layers
Applied Physics Express 6, 021003 (2013).
DOI: 10.7567/APEX.6.021003
Electron mobility of ultrathin InN on yttria-stabilized zirconia with two-dimensionally grown initial layers
Applied Physics Letters 102, 022103 (2013).
DOI: 10.1063/1.4776210
Electrical properties of amorphous-Al2O3/single-crystal ZnO heterointerfaces
Applied Physics Letters 103, 172101 (2013).
DOI: 10.1063/1.4826538
Atomic scattering spectroscopy for determination of the polarity of semipolar AlN grown on ZnO
Applied Physics Letters 103, 192111 (2013).
DOI: 10.1063/1.4829478
Band Configuration of SiO2/m-Plane ZnO Heterointerface Correlated with Electrical Properties of Al/SiO2/ZnO Structures
Japanese Journal of Applied Physics 52, 011101 (2013).
DOI: 10.7567/JJAP.52.011101
Theoretical study of the initial stage of InN growth on cubic zirconia (111) substrates
Physica Status Solidi RRL 7, 207 (2013).
DOI: 10.1002/pssr.201206465
2012
Polarity control and growth mode of InN on yttria-stabilized zirconia (111) surfaces
Physica Status Solidi A 209, 2251 (2012).
DOI: 10.1002/pssa.201228287
2011
Polarity Dependence of Structural and Electronic Properties of Al2O3/InN Interfaces
Applied Physics Express 4, 091002 (2011).
DOI: 10.1143/APEX.4.091002
Dependence on composition of the optical polarization properties of m-plane InxGa1−xN commensurately grown on ZnO
Applied Physics Letters 99, 061912 (2011).
DOI: 10.1063/1.3624462
Demonstration of enhanced optical polarization for improved deep ultraviolet light extraction in coherently grown semipolar Al0.83Ga0.17N/AlN on ZnO substrates
Applied Physics Letters 99, 121906 (2011).
DOI: 10.1063/1.3641876
Polarity replication across m-plane GaN/ZnO interfaces
Applied Physics Letters 99, 181910 (2011).
DOI: 10.1063/1.3659008
Fabrication of densely packed arrays of GaN nanostructures on nano-imprinted substrates
Journal of Crystal Growth 319, 102 (2011).
DOI: 10.1016/j.jcrysgro.2011.01.078
Coherent growth of r-plane GaN films on ZnO substrates at room temperature
Physica Status Solidi A 208, 834 (2011).
DOI: 10.1002/pssa.201026397
Band offsets of polar and nonpolar GaN/ZnO heterostructures determined by synchrotron radiation photoemission spectroscopy
Physica Status Solidi B 248, 956 (2011).
DOI: 10.1002/pssb.201046459
X-ray reciprocal space mapping study on semipolar InAlN films coherently grown on ZnO substrates
Physica Status Solidi RRL 5, 400 (2011).
DOI: 10.1002/pssr.201105380
Growth of group III nitride nanostructures on nano-imprinted sapphire substrates
Thin Solid Films 519, 6534 (2011).
DOI: 10.1016/j.tsf.2011.04.120
2010
Layer-by-Layer Growth of InAlN Films on ZnO(000-1) Substrates at Room Temperature
Applied Physics Express 3, 021001 (2010).
DOI: 10.1143/APEX.3.021001
Structural Characteristics of GaN/InN Heterointerfaces Fabricated at Low Temperatures by Pulsed Laser Deposition
Applied Physics Express 3, 021003 (2010).
DOI: 10.1143/APEX.3.021003
Improvement in the Crystalline Quality of Semipolar AlN(1-102) Films by Using ZnO Substrates with Self-Organized Nanostripes
Applied Physics Express 3, 041002 (2010).
DOI: 10.1143/apex.3.041002
Characteristics of m-Plane InN Films Grown on ZnO Substrates at Room Temperature by Pulsed Laser Deposition
Applied Physics Express 3, 061001 (2010).
DOI: 10.1143/APEX.3.061001
Electronic structures of c-plane and a-plane AlN/ZnO heterointerfaces determined by synchrotron radiation photoemission spectroscopy
Applied Physics Letters 97, 252111 (2010).
DOI: 10.1063/1.3530445
Structural and Optical Properties of Nonpolar AlN(11-20) Films Grown on ZnO(11-20) Substrates with a Room-Temperature GaN Buffer Layer
Japanese Journal of Applied Physics 49, 060213 (2010).
DOI: 10.1143/JJAP.49.060213
Room-Temperature Epitaxial Growth of High-Quality m-Plane InAlN Films on Nearly Lattice-Matched ZnO Substrates
Japanese Journal of Applied Physics 49, 070202 (2010).
DOI: 10.1143/JJAP.49.070202
Characteristics of m-Plane InN Films Grown on ZnO Substrates at Room Temperature by Pulsed Laser Deposition
Japanese Journal of Applied Physics 49, 080202 (2010).
DOI: 10.1143/JJAP.49.080202
Growth Orientation Control of Semipolar InN Films Using Yttria-Stabilized Zirconia Substrates
Japanese Journal of Applied Physics 49, 080204 (2010).
DOI: 10.1143/JJAP.49.080204
Improvements in Optical Properties of Semipolar r-Plane GaN Films Grown Using Atomically Flat ZnO Substrates and Room-Temperature Epitaxial Buffer Layers
Japanese Journal of Applied Physics 49, 100202 (2010).
DOI: 10.1143/JJAP.49.100202
Structural characteristics of semipolar InN (11-2l) films grown on yttria stabilized zirconia substrates
Physica Status Solidi A 203, 2269 (2010).
DOI: 10.1002/pssa.201026215
Structural properties of semipolar AlxGa1−xN(1-103) films grown on ZnO substrates using room temperature epitaxial buffer layers
Physica Status Solidi A 207, 2149 (2010).
DOI: 10.1002/pssa.201026209
Optical polarization characteristics of m-plane InGaN films coherently grown on ZnO substrates
Physica Status Solidi RRL 4, 188 (2010).
DOI: 10.1002/pssr.201004204
Investigation on the conversion efficiency of InGaN solar cells fabricated on GaN and ZnO substrates
Physica Status Solidi RRL 4, 88 (2010).
DOI: 10.1002/pssr.201004044
2009
Room-Temperature Epitaxial Growth of High Quality AlN on SiC by Pulsed Sputtering Deposition
Applied Physics Express 2, 011003 (2009).
DOI: 10.1143/apex.2.011003
Characteristics of InN grown directly on Al2O3(0001) substrates by pulsed laser deposition
Journal of Crystal Growth 311, 1316 (2009).
DOI: 10.1016/j.jcrysgro.2008.12.015
Epitaxial growth of InN films on lattice-matched EuN buffer layers
Journal of Crystal Growth 311, 4483 (2009).
DOI: 10.1016/j.jcrysgro.2009.08.020
Growth of group III nitride films by pulsed electron beam deposition
Journal of Solid State Chemistry 182, 1241 (2009).
DOI: 10.1016/j.jssc.2009.01.028
Epitaxial growth of high purity cubic InN films on MgO substrates using HfN buffer layers by pulsed laser deposition
Journal of Solid State Chemistry 182, 2887 (2009).
DOI: 10.1016/j.jssc.2009.08.002
Room-temperature epitaxial growth of high-quality m-plane InGaN films on ZnO substrates
Physica Status Solidi RRL 3, 124 (2009).
DOI: 10.1002/pssr.200903072
Room temperature growth of semipolar AlN (1-102) films on ZnO (1-102) substrates by pulsed laser deposition
Physica Status Solidi RRL 3, 58 (2009).
DOI: 10.1002/pssr.200802263
2008
Low-temperature growth of high quality AlN films on carbon face 6H-SiC
Physica Status Solidi RRL 2, 13 (2008).
DOI: 10.1002/pssr.200701246
2007
Room temperature epitaxial growth of m-plane GaN on lattice-matched ZnO substrates
Applied Physics Letters 90, 041908 (2007).
DOI: 10.1063/1.2433758
Growth temperature dependence of structural properties for AlN films on ZnO (000-1) substrates
Applied Physics Letters 90, 141908 (2007).
DOI: 10.1063/1.2719167
Low temperature epitaxial growth of GaN films on LiGaO2 substrates
Applied Physics Letters 90, 211913 (2007).
DOI: 10.1063/1.2737928
Epitaxial growth of nonpolar AlN films on ZnO substrates using room temperature grown GaN buffer layers
Applied Physics Letters 91, 081915 (2007).
DOI: 10.1063/1.2775035
Epitaxial growth mechanisms of AlN on SiC substrates at room temperature
Applied Physics Letters 91, 151903 (2007).
DOI: 10.1063/1.2795804
Growth of a-plane GaN on lattice-matched ZnO substrates using a room-temperature buffer layer
Applied Physics Letters 91, 191905 (2007).
DOI: 10.1063/1.2809361
Structural properties of GaN grown on Zn-face ZnO at room temperature
Journal of Crystal Growth 305, 70 (2007).
DOI: 10.1016/j.jcrysgro.2007.04.027
2006
Polarity control of GaN grown on ZnO (000-1) surfaces
Applied Physics Letters 88, 181907 (2006).
DOI: 10.1063/1.2200157
Investigation of the initial stage of GaN epitaxial growth on 6H-SiC (0001) at room temperature
Applied Physics Letters 89, 031916 (2006).
DOI: 10.1063/1.2227616
Room temperature epitaxial growth of AlGaN on ZnO by pulsed laser deposition
Applied Physics Letters 89, 111918 (2006).
DOI: 10.1063/1.2354413
Characteristics of Single Crystal ZnO Annealed in a Ceramic ZnO Box and Its Application for Epitaxial Growth of GaN
Japanese Journal of Applied Physics 45, 5724 (2006).
DOI: 10.1143/JJAP.45.5724
Characteristics of GaN/ZrB2 Heterointerfaces Prepared by Pulsed Laser Deposition
Japanese Journal of Applied Physics 45, 6893 (2006).
DOI: 10.1143/JJAP.45.6893
Layer-by-Layer Growth of AlN on ZnO (000-1) Substrates at Room Temperature
Japanese Journal of Applied Physics 45, L1139 (2006).
DOI: 10.1143/JJAP.45.L1139
Characteristics of InGaN with High In Concentrations Grown on ZnO at Low Temperatures
Japanese Journal of Applied Physics 45, L611 (2006).
DOI: 10.1143/JJAP.45.L611
Low temperature epitaxial growth of In0.25Ga0.75N on lattice-matched ZnO by pulsed laser deposition
Journal of Applied Physics 99, 123513 (2006).
DOI: 10.1063/1.2206883
Heteroepitaxial growth of GaN on atomically flat LiTaO3(0001) using low-temperature AIN buffer layers
Journal of Crystal Growth 293, 22 (2006).
DOI: 10.1016/j.jcrysgro.2006.05.006
Effects of low-temperature-grown buffers on pulsed-laser deposition of GaN on LiNbO3
Journal of Vacuum Science & Technology A 24, 2021 (2006).
DOI: 10.1116/1.2345644
Epitaxial growth of InN on nearly lattice-matched (Mn,Zn)Fe2O4
Solid State Communications 137, 208 (2006).
DOI: 10.1016/j.ssc.2005.11.015
2005
Room-temperature epitaxial growth of GaN on lattice-matched ZrB2 substrates by pulsed-laser deposition
Applied Physics Letters 87, 221907 (2005).
DOI: 10.1063/1.2137876
GaN Heteroepitaxial Growth on LiTaO3(0001) Step Substrates by Pulsed Laser Deposition
Japanese Journal of Applied Physics 44, L1522 (2005).
DOI: 10.1143/JJAP.44.L1522
GaN heteroepitaxial growth on LiNbO3(0001) step substrates with AlN buffer layers
Physica Status Solidi A 202, R145 (2005).
DOI: 10.1002/pssa.200521226
2004
Room Temperature Layer by Layer Growth of GaN on Atomically Flat ZnO
Japanese Journal of Applied Physics 43, L53 (2004).
DOI: 10.1143/JJAP.43.L53
Effect of ambient gas on pulsed laser deposition of group III nitrides
Thin Solid Films 457, 118 (2004).
DOI: 10.1016/j.tsf.2003.12.006